| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrator, for manufacturing the vibrator regardless of a process of diffusion and properties and the state of a wet etchant. <P>SOLUTION: The method of manufacturing the vibrator includes the processes of: forming a high-density impurity layer on the surface of a substrate; forming a mask on the high-density impurity layer; patterning the mask in the shape of the vibrator; removing the high-density impurity layer by dry etching until reaching at least the substrate while leaving the lower part of the vibrator having been patterned; forming a vibrator in a beam shape having the part below the high-density impurity layer removed by wet etching; and removing the mask formed on the high-density impurity layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
