发明名称 CUTTING BLADE DETECTING MECHANISM
摘要 <P>PROBLEM TO BE SOLVED: To provide a cutting blade detecting mechanism capable of separately detecting states of individual cutting blades of multiple blades. <P>SOLUTION: This cutting blade detecting mechanism includes: a first blade detecting means for detecting the state of a first cutting blade 28a; and a second blade detecting means for detecting the state of a second cutting blade 28b. In the first blade detecting means, a first light emitting part 76 and a first light receiving part 80 are positioned so as to pinch a first cutting blade 28a, and an optical axis connecting the first light emitting part 76 and the first light receiving part 80 is disposed to be inclined with respect to the shaft center of a spindle 26. In the second blade detecting means, a second light emitting part 84 and a second light receiving part 88 are positioned so as to pinch a second cutting blade 28b, and an optical axis connecting the second light emitting part 84 and the second light receiving part 88 is disposed to be inclined with respect to the shaft center of the spindle 26. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012040651(A) 申请公布日期 2012.03.01
申请号 JP20100184895 申请日期 2010.08.20
申请人 DISCO CORP 发明人 SEKIYA KAZUMA
分类号 B24B49/12;H01L21/301 主分类号 B24B49/12
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