| 发明名称 |
TEST-USE INDIVIDUAL SUBSTRATE, PROBE, AND SEMICONDUCTOR WAFER TESTING APPARATUS |
| 摘要 |
[Problems to be solved] To provide a test-use individual substrate capable of improving testing accuracy and connecting reliability. [Means for solving the Problems] A test-use individual substrate 30 which is used for testing a semiconductor wafer, comprises a main body portion 31, thin portions 321, 322 extending from the main body portion 31 and being relatively thinner than the main body portion, and bumps 33 provided on the thin portions 321, 322. [Selected Drawing] FIG. 4
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| 申请公布号 |
US2012049876(A1) |
申请公布日期 |
2012.03.01 |
| 申请号 |
US201113212585 |
申请日期 |
2011.08.18 |
| 申请人 |
MATSUMURA SHIGERU;KATO KOHEI;SUGAI KATSUSHI;SHIROYAMA KOICHI;HIGASHI MITSUTOSHI;SHIRAISHI AKINORI;SAKAGUCHI HIDEAKI;SHINKO ELECTRIC INDUSTRIES CO., LTD.;ADVANTEST CORPORATION |
发明人 |
MATSUMURA SHIGERU;KATO KOHEI;SUGAI KATSUSHI;SHIROYAMA KOICHI;HIGASHI MITSUTOSHI;SHIRAISHI AKINORI;SAKAGUCHI HIDEAKI |
| 分类号 |
G01R31/00;G01R1/067;G01R31/20;G01R31/26 |
主分类号 |
G01R31/00 |
| 代理机构 |
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