发明名称 SEMICONDUCTOR TESTING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To input a high-quality signal to a device to be tested, without adjusting the impedance of wiring or a transmission line. <P>SOLUTION: The present invention relates to a semiconductor testing apparatus 1 including a DUT board 4 on which a plurality of DUTs 7 are mounted; a test pin 2 for outputting a test signal to the DUT 7; and a transmission line 3 connecting the DUT board 4 and the test pin 2. The semiconductor testing apparatus is characterized in that the DUT board 4 includes a correction resistor 11 which is provided between a branch point 10, where branch wiring 9 for distributing the test signal to the DUT 7 is branched, and the transmission line 3, for correcting impedance mismatching between synthetic impedance of the branch wiring 9 and an output resistor 6 provided in the test pin 2. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012042381(A) 申请公布日期 2012.03.01
申请号 JP20100185023 申请日期 2010.08.20
申请人 YOKOGAWA ELECTRIC CORP 发明人 WATANABE YUJI
分类号 G01R31/28 主分类号 G01R31/28
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