| 摘要 |
Provided are a micropump that makes it possible to reduce the entire size and improve pumping performance of fluid, and a method of operating the micropump. The micropump includes a case that forms a first space and a second space that are connected through a connection channel, a fluid intake pipe that is connected to the first space, a fluid discharge pipe that is connected to the second space, a first deforming member that is disposed on the case to cover the first space, and a second deforming member that is disposed on the case to cover the second space. The second deforming member is formed larger than the first deforming member and the maximum displacement of the second deforming member is larger than the maximum displacement of the first deforming member.
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