| 发明名称 |
Apparatus and method for the determination of the position of a disk-shaped object |
| 摘要 |
The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22). |
| 申请公布号 |
US8125653(B2) |
申请公布日期 |
2012.02.28 |
| 申请号 |
US20090556175 |
申请日期 |
2009.09.09 |
| 申请人 |
WENIGER GERT;POHLMANN ULRICH;RENNICKE FRANK;VISTEC SEMICONDUCTOR SYSTEMS JENA GMBH |
发明人 |
WENIGER GERT;POHLMANN ULRICH;RENNICKE FRANK |
| 分类号 |
G01B11/14 |
主分类号 |
G01B11/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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