DETERMINATION METHOD OF COMPENSATION VALUE FOR DIFFERENTIAL COLUMN SHORTENING USING MOVING AVERAGE METHOD

摘要

PURPOSE: A correction value determination method for inequality reduction volumes is provided to determine similar correction values for similar structure by using an average movement calculation method. CONSTITUTION: An allowable error value for a layer where inequality reduction volumes are corrected is determined(S1). A correction group for a structure is determined based on a difference between accumulated an average movement correction value and the accumulated inequality reduction volumes(S2). Similar correction values are determined for each layer including the correction group(S3).