发明名称 |
EVAPORATION SOURCE FOR ORGANIC MATERIAL AND VAPOR DEPOSITING APPARATUS INCLUDING THE SAME |
摘要 |
PURPOSE: An organic-material evaporating source and a depositing device comprising the same are provided to curb deformation due to difference in thermal expansion between inner parts of an organic-material evaporating source. CONSTITUTION: An organic-material evaporating source(100) comprises a crucible(10), a heater(20), and a housing(50). The crucible comprises a body and a nozzle. The crucible is formed from metal, on which stainless steel is coated. The metal comprises copper or aluminum. The thickness of the stainless steel is within 0.05~0.5mm. The nozzle is connected to an opening, which is formed on one side of the body. The heater is arranged adjacent to the crucible. The housing holds the crucible and the heater. |
申请公布号 |
KR20120015387(A) |
申请公布日期 |
2012.02.21 |
申请号 |
KR20100073530 |
申请日期 |
2010.07.29 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
LEE, CHOONG HO;JEONG, DA HEE;OH, YOON CHAN |
分类号 |
C23C14/12;C23C14/24;H01L51/56 |
主分类号 |
C23C14/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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