发明名称 |
Amorphous carbon film, process for forming amorphous carbon film, conductive member provided with amorphous carbon film, and fuel cell separator |
摘要 |
The amorphous carbon film of the present invention is an amorphous carbon film comprising carbon and hydrogen, wherein the amorphous carbon film contains not more than 30 atomic % (excluding 0%) of hydrogen and, when the entire amount of the carbon is taken as 100 atomic %, carbon having an sp2 hybrid orbital is present in an amount of not less than 70 atomic % and less than 100 atomic %. Conductivity is imparted to an amorphous carbon film by controlling the contents of hydrogen, Csp3 and the like to increase a structure comprising Csp2. This amorphous carbon film can be formed by plasma CVD using a reaction gas containing one or more gases selected from a carbocyclic compound gas containing carbon having an sp2 hybrid orbital, and a heterocyclic compound gas containing carbon having an sp2 hybrid orbital and silicon and/or nitrogen. By forming the amorphous carbon film on a surface of a substrate, a conductive member can be obtained. |
申请公布号 |
US8119242(B2) |
申请公布日期 |
2012.02.21 |
申请号 |
US20070300179 |
申请日期 |
2007.05.22 |
申请人 |
ISEKI TAKASHI;YAMADA YUKA;NAKANISHI KAZUYUKI;OSHIMA TADASHI;MORI HIROYUKI;HORIE TOSHIO;SUZUKI KEN-ICHI;KITAHARA GAKU;KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO |
发明人 |
ISEKI TAKASHI;YAMADA YUKA;NAKANISHI KAZUYUKI;OSHIMA TADASHI;MORI HIROYUKI;HORIE TOSHIO;SUZUKI KEN-ICHI;KITAHARA GAKU |
分类号 |
B32B9/00 |
主分类号 |
B32B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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