发明名称 |
METHOD FOR MANUFACTURING NANO-IMPRINT MOLD, METHOD FOR FORMING RESIN PATTERN BY NANO-IMPRINT TECHNIQUE, AND NANO-IMPRINT MOLD |
摘要 |
A nano-imprint mold includes a mold body having a first surface provided with a pattern having projections and recesses, a second surface opposite the first surface and a side surface between the first surface and the second surface; and a mold base having a surface for fixing the mold body thereto. In addition, the second surface of the mold body is fixed to a part of the surface of the mold base, the second surface of the mold body being disposed away from at least a part of an edge of the surface of the mold base. Furthermore, the mold body has a shape such that a width thereof in a direction orthogonal to a direction extending from the first surface toward the second surface decreases from the first surface toward the second surface.
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申请公布号 |
US2012040041(A1) |
申请公布日期 |
2012.02.16 |
申请号 |
US201113204907 |
申请日期 |
2011.08.08 |
申请人 |
TSUJI YUKIHIRO;YANAGISAWA MASAKI;SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
TSUJI YUKIHIRO;YANAGISAWA MASAKI |
分类号 |
B29C59/02 |
主分类号 |
B29C59/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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