| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain with a high yield, a liquid-ejection head having an ejection port member precisely shaped so that the parts corresponding to the ejection port openings of the ejection port member, of a plurality of ejection ports are different from each other in thickness. <P>SOLUTION: A method for manufacturing the liquid-ejection head having the plurality of ejection ports arranged to eject liquid includes: a step for preparing a substrate having a first layer, a second layer, and a third layer stacked in this order, the second layer more resistant than the third layer to etching by an etching method to be used on the third layer; a step for partially etching the third layer by the etching method to expose the second layer; and a step for removing the exposed second layer at least in part to expose some area on the top surface of the first layer, opening a first one of the ejection ports down from the exposed area of the top surface, and opening a second one of the ejection ports down from the top surface of the third layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
