发明名称 MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LITHOGRAPHY APPARATUS
摘要 A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.
申请公布号 US2012038233(A1) 申请公布日期 2012.02.16
申请号 US201013265676 申请日期 2010.04.14
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V. 发明人 FUNDA SAHIN;BUSTRAAN KRIJN FREDERIK;SEIJGER OLAV;POST JUSTUS BJORN
分类号 H02K7/09 主分类号 H02K7/09
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