| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave element suppressing occurrence of breaking and peeling of a conductor layer and improving durability in an IDT electrode having an electrode finger where a plurality of conductor layers are laminated and to provide a surface acoustic wave device loading the element. <P>SOLUTION: A surface acoustic wave element 1 includes an IDT electrode 11 having an electrode finger 11a on a piezoelectric substrate 10. In the electrode finger 11a, an intermediate layer 12 and an electrode layer 13 having a heat expansion coefficient larger than the intermediate layer 12 are laminated. The electrode finger 11a has a trapezoidal cross-sectional shape extending in a direction approaching the piezoelectric substrate 10. An angle α<SB POS="POST">1</SB>which a side 1 of the intermediate layer 12 makes differs from an angle β<SB POS="POST">1</SB>which a side of the electrode layer 13 makes. <P>COPYRIGHT: (C)2012,JPO&INPIT |
