发明名称 SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device capable of suppressing current collapse. <P>SOLUTION: A semiconductor device of the present invention comprises: a channel layer 14 composed of nitride semiconductors; an electron supplying layer 16 that is provided on the channel layer 14 and that has a larger band gap than that of the channel layer 14 and is composed of nitride semiconductors; and an Fe-doped cap layer 18 that is composed of nitride semiconductors and provided on the electron supplying layer 16. According to the present invention, current collapse can be suppressed. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012028706(A) 申请公布日期 2012.02.09
申请号 JP20100168643 申请日期 2010.07.27
申请人 SUMITOMO ELECTRIC IND LTD 发明人 KOUCHI TAKESHI
分类号 H01L21/338;C23C16/34;H01L21/205;H01L29/778;H01L29/812 主分类号 H01L21/338
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