ELECTROMECHANICAL SWITCH AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a nano and a micro electromechanical switch made of single-crystal diamond which avoids stiction and has superior mechanical friction properties.

SOLUTION: The method of manufacturing the electromechanical switch includes: a process S1 of forming a graphite layer in a diamond single-crystal substrate; a process S2 of forming a diamond epitaxial layer to which impurity elements are added to cover one surface of the diamond single-crystal substrate; a process S3 of forming a first projection and a second projection by forming grooves on the surface of the diamond single-crystal substrate; a process S4 of removing the graphite layer to form a movable structure part having a space part with the surface of the diamond single-crystal substrate; and a process S5 of forming a first electrode part and a second electrode part at the first projection part and second projection part respectively.

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