发明名称 Solid state imaging device comprising hydrogen supply film and antireflection film
摘要 Provided is a MOS type solid state imaging device, including a semiconductor substrate, a plurality of pixels arranged on the semiconductor substrate, each pixel having a light receiving element for generating a signal charge due to incident light, and a MOS transistor for reading the signal charge, and a hydrogen supply film arranged on the semiconductor substrate over the plurality of pixels and having a region corresponding to the light receiving element at least a part of which has a film thickness greater than the other part of the region.
申请公布号 US8110885(B2) 申请公布日期 2012.02.07
申请号 US20050216006 申请日期 2005.09.01
申请人 IIDA SATOKO;WATANABE TAKANORI;CANON KABUSHIKI KAISHA 发明人 IIDA SATOKO;WATANABE TAKANORI
分类号 H01L31/0232;H01L27/14;H01L27/146 主分类号 H01L31/0232
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