发明名称 NANO-IMPRINTING RESIN STAMPER AND NANO-IMPRINTING APPARATUS USING THE SAME
摘要 The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a resin composition that contains a silsesquioxane derivative as a major constituent having a plurality of polymerizable functional groups, another polymerizable resin component having a plurality of polymerizable functional groups and different from the silsesquioxane derivative, and a photopolymerizable initiator, in which the content percentage of the photopolymerizable initiator is equal to or more than 0.3 mass % and equal to or less than 3 mass % relative to a total mass of the silsesquioxane derivative and the polymerizable resin component, and the micro structure layer permits equal to or more than 80% of light to pass therethrough at a wavelength of 365 nm.
申请公布号 US2012027884(A1) 申请公布日期 2012.02.02
申请号 US201113193666 申请日期 2011.07.29
申请人 ISHII SATOSHI;OGINO MASAHIKO;SHIZAWA NORITAKE;MORI KYOICHI;MIYAUCHI AKIHIRO 发明人 ISHII SATOSHI;OGINO MASAHIKO;SHIZAWA NORITAKE;MORI KYOICHI;MIYAUCHI AKIHIRO
分类号 B29C43/36;B29D17/00 主分类号 B29C43/36
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