发明名称
摘要 <p>A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.</p>
申请公布号 JP4864280(B2) 申请公布日期 2012.02.01
申请号 JP20020584094 申请日期 2002.04.24
申请人 发明人
分类号 G01F1/00;G05B11/36;G01F25/00;G05B5/01;G05B13/04;G05D7/06 主分类号 G01F1/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利