| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for reducing constraints of a manufacturing process and producing a fine thermoelectric conversion material structure having a low thermal conductivity and a high aspect ratio with high accuracy. <P>SOLUTION: A plurality of holes are formed on a mold substrate and then a thermoelectric conversion material structure 2 is formed by filling the inside of the holes with thermoelectric conversion materials in an aerosol deposition method. Using this aerosol deposition method forms a micropore (nanovoid) inside the columnar thermoelectric conversion material structure 2. The columnar thermoelectric conversion material structure 2 has characteristics of a high electrical conductivity and a low thermal conductivity because it includes the nanovoid in its inside. <P>COPYRIGHT: (C)2012,JPO&INPIT |
