| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an installation method of treatment container capable of improving maintainability at a low cost. <P>SOLUTION: An installation method of treatment container that comprises multiple members and is connected to means capable of decompression at least performs the following steps sequentially: step (a) of arranging the treatment container in an atmospheric pressure state at a location to deliver a treated substrate in a state that at least a part of the members is unfixed; step (b) of connecting a transport container for transporting the treated substrate to the treatment container in a state that at least a part of the members is unfixed; step (c) of adjusting each location of the members so that the treatment container is arranged at a predetermined location to the transport container; step (d) of fixing all the members by decompressing the inside of the treatment container using the means capable of decompression; and step (e) of separating the treatment container from the transport container. <P>COPYRIGHT: (C)2012,JPO&INPIT |
