| 摘要 |
<p>Provided is a particle beam irradiation apparatus which uses a plurality of sets of scanning magnets, has a high precision, and which is capable of charged particle beam scanning from low speed to high speed with a high degree of freedom. A particle beam irradiation apparatus, which scans an incident charged particle beam along target trajectories in two directions, which are an X-direction and a Y-direction, which are perpendicular to the direction of progression of the charged particle beam so as to irradiate an object, is equipped with a plurality of sets of scanning magnets for scanning the charged particle beam in the two directions. The target trajectories are given as time-series target trajectory data for which target irradiation positions corresponding to the times have been determined. Commanded values of each of the scanning magnets of the plurality of sets of scanning magnets are generated on the basis of a plurality of data for which the time-series target trajectory data have been frequency-separated.</p> |
