发明名称 |
Methods for cleaning process kits and chambers, and for ruthenium recovery |
摘要 |
A method is provided for recovering a metal from electronic device deposition equipment including: providing deposition equipment wherein the deposition equipment is at least partially coated with a deposited metal; blasting the deposition equipment with a grit to remove at least some of the deposited metal to form a blasted grit and a removed metal; and separating at least some of the removed metal from the blasted grit to form a recovered metal. |
申请公布号 |
US8097089(B2) |
申请公布日期 |
2012.01.17 |
申请号 |
US20080339037 |
申请日期 |
2008.12.18 |
申请人 |
TAN SAMANTHA S. H.;WANG JIANQI;QUANTUM GLOBAL TECHNOLOGIES LLC |
发明人 |
TAN SAMANTHA S. H.;WANG JIANQI |
分类号 |
H01G9/04 |
主分类号 |
H01G9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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