发明名称 |
DRIVE METHOD FOR STARTING AND OPERATING A RESONANT SCANNING MEMS DEVICE AT ITS RESONANT FREQUENCY |
摘要 |
<p>The resonance frequency of a forced torsionally oscillating mirror MEMS device can be controlled in the presence of perturbations by means of a closed loop feedback device and method of using it. The method is implemented through a simple algorithm, implemented in either software or hardware, that maintains the condition of resonance, or another selected frequency, by recursively determining that the center of the driving voltage pulse is positioned at a point on the measured positional waveform of the oscillating system.</p> |
申请公布号 |
WO2012005756(A1) |
申请公布日期 |
2012.01.12 |
申请号 |
WO2011US01153 |
申请日期 |
2011.06.28 |
申请人 |
HEADWAY TECHNOLOGIES, INC;DROUIN, DAVID;HU, DAVID;CHUNG, SUNG |
发明人 |
DROUIN, DAVID;HU, DAVID;CHUNG, SUNG |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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