摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive substrate with a surface electrode, having high photoelectric conversion efficiency, and a method for manufacturing the transparent conductive substrate with a surface electrode, and to provide a thin film solar cell and a method for manufacturing the thin film solar cell. <P>SOLUTION: An indium oxide amorphous transparent conductive film is formed as a base film 21 and a zinc oxide crystalline transparent conductive film is formed over the amorphous transparent conductive film. Thereby, a surface electrode 2 having excellent irregularity is formed. Accordingly, the surface electrode 2 having a higher light confinement effect can be provided, and a thin film solar cell 10 having a higher photoelectric conversion efficiency can be obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT |