发明名称 TRANSPARENT CONDUCTIVE SUBSTRATE WITH SURFACE ELECTRODE AND METHOD FOR MANUFACTURING THE SAME, AND THIN FILM SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a transparent conductive substrate with a surface electrode, having high photoelectric conversion efficiency, and a method for manufacturing the transparent conductive substrate with a surface electrode, and to provide a thin film solar cell and a method for manufacturing the thin film solar cell. <P>SOLUTION: An indium oxide amorphous transparent conductive film is formed as a base film 21 and a zinc oxide crystalline transparent conductive film is formed over the amorphous transparent conductive film. Thereby, a surface electrode 2 having excellent irregularity is formed. Accordingly, the surface electrode 2 having a higher light confinement effect can be provided, and a thin film solar cell 10 having a higher photoelectric conversion efficiency can be obtained. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012009755(A) 申请公布日期 2012.01.12
申请号 JP20100146335 申请日期 2010.06.28
申请人 SUMITOMO METAL MINING CO LTD 发明人 YAMANOBE YASUNARI;MATSUMURA FUMIHIKO
分类号 H01L31/04 主分类号 H01L31/04
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