| 摘要 |
When a high power signal is input to an electromechanical device, electrostatic force can automatically and unintentionally drive the movable electrode. A high reliability electromechanical device that prevents this is achieved. The electromechanical device of the invention is an electromechanical device formed on a substrate, and having a signal electrode and a drive electrode formed across a gap from a movable electrode. Applying an attraction force between the movable electrode and the drive electrode enables the movable electrode to contact the signal electrode. A high electrostatic capacitance is formed by disposing the movable electrode and drive electrode in opposition with a dielectric layer therebetween on the RF signal input port side. As a result, the potential difference between the movable electrode and drive electrode is reduced even when a high power signal is input, and a high reliability electromechanical device can be achieved. |
