发明名称 BUBBLE-CONTAINING LIQUID GENERATING DEVICE AND TREATMENT DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a bubble-containing liquid generating device that changes the size of bubbles contained in a bubble-containing liquid, and a treatment device using the generating device. <P>SOLUTION: The bubble-containing liquid generating device includes: a gas-dissolved liquid generating mechanism (11, 13, 14, 15) generating a gas-dissolved liquid; a two-fluid nozzle 16 mixing the gas-dissolved liquid generated by the gas-dissolved liquid generating mechanism and a gas so as to jet a mist-like liquid; and gas flow rate control means (18, 19, 27, 25) controlling the flow rate of the gas supplied to the two-fluid nozzle 16. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012000580(A) 申请公布日期 2012.01.05
申请号 JP20100138969 申请日期 2010.06.18
申请人 SHIBAURA MECHATRONICS CORP 发明人 HIROSE HARUMICHI;ANDO YOSHIHIRO;TERAKADO HIDEAKI;NISHIBE YUKINOBU
分类号 B01F5/20;B01F1/00;B01F15/06;H01L21/304 主分类号 B01F5/20
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