摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray waveguide that can simultaneously confine X-rays having different energies or incident angles and guide the X-rays, and a method of manufacturing the X-ray waveguide. <P>SOLUTION: An X-ray waveguide includes a core part for wave-guiding of an X-ray and a clad part for confining the X-ray in the core part. The clad part is a periodic structure including a material having a different refraction index real part. The periodic structure includes two or more meso structure body films having different structure periods. A method of manufacturing the X-ray waveguide includes the steps of: forming a first meso structure body film; forming a second and subsequent meso structure films having different structure periods on the first meso structure body film; and configuring the X-ray waveguide by providing the first meso structure film and second and subsequent meso structure films in the core part. <P>COPYRIGHT: (C)2012,JPO&INPIT |