发明名称 X-RAY WAVEGUIDE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide an X-ray waveguide that can simultaneously confine X-rays having different energies or incident angles and guide the X-rays, and a method of manufacturing the X-ray waveguide. <P>SOLUTION: An X-ray waveguide includes a core part for wave-guiding of an X-ray and a clad part for confining the X-ray in the core part. The clad part is a periodic structure including a material having a different refraction index real part. The periodic structure includes two or more meso structure body films having different structure periods. A method of manufacturing the X-ray waveguide includes the steps of: forming a first meso structure body film; forming a second and subsequent meso structure films having different structure periods on the first meso structure body film; and configuring the X-ray waveguide by providing the first meso structure film and second and subsequent meso structure films in the core part. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012002760(A) 申请公布日期 2012.01.05
申请号 JP20100139920 申请日期 2010.06.18
申请人 CANON INC 发明人 KUBO WATARU;OKAMOTO KOHEI;TAKAMOTO ATSUSHI;MIYATA HIROKATSU;NOMA TAKASHI
分类号 G21K1/06;G21K1/00 主分类号 G21K1/06
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