发明名称 METHOD FOR PRODUCING STRUCTURE AND METHOD FOR PRODUCING LIQUID DISCHARGE HEAD
摘要 A method for producing a structure includes, in this order, providing a substrate composed of a first resin layer and a second resin layer laminated in this order, the first resin layer being made of a positive photosensitive resin having positive photosensitivity to light having a wavelength of 280 nm or more, and the second resin layer containing an anthracene compound, partially exposing the second resin layer to light having a wavelength of 300 nm or more, radiating light having a wavelength of 280 nm or more to the first resin layer through the exposed portions of the second resin layer using the unexposed portions of the second resin layer as a mask, thereby exposing the first resin layer to light, and removing the exposed portions of the first resin layer to form a structure.
申请公布号 US2011316188(A1) 申请公布日期 2011.12.29
申请号 US201113168668 申请日期 2011.06.24
申请人 ISHIKURA HIROE;CANON KABUSHIKI KAISHA 发明人 ISHIKURA HIROE
分类号 B29C33/40;G03F7/20 主分类号 B29C33/40
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