| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat conduction type barometric sensor (using thermal excitation) for the measurement of a high bandwidth barometric pressure with high sensitivity and high accuracy that has simple structure and circuit configuration and can measure a barometric pressure in the range of a very low barometric pressure to 1 atm or higher using one sensor chip. <P>SOLUTION: A cantilever-shaped thin film 10 is provided with a thin-film temperature sensor, heating means, and excitation means. The excitation means utilizes warpage and bending due to a difference in thermal expansion between two main layers constituting the thin film during intermittent heating by heating means of a thin-film heater. The two main layers are a silicon layer and a thermally-oxidized silicon film which are significantly different from each other in the thermal expansion coefficient. This barometric sensor further includes a circuit in which the sensitivity is enhanced by the integration of Seebeck current for a predetermined time, and a cap which can suppress the influence of an air stream. <P>COPYRIGHT: (C)2012,JPO&INPIT |
