MICROWAVE PLASMA PROCESSING APPARATUS AND METHOD OF SUPPLYING MICROWAVES USING THE APPARATUS,申请号KR20090044510-传众专利搜索

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发明名称	MICROWAVE PLASMA PROCESSING APPARATUS AND METHOD OF SUPPLYING MICROWAVES USING THE APPARATUS
摘要
申请公布号	KR101094744(B1)	申请公布日期	2011.12.16
申请号	KR20090044510	申请日期	2009.05.21
申请人		发明人
分类号	C23C16/511	主分类号	C23C16/511
代理机构		代理人
主权项
地址

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