发明名称 Method for producing cerium oxide
摘要 <p>The present invention relates to an abrasive containing a slurry in which cerium oxide particles having an intensity ratio of an area of a primary peak appearing at 27 to 30° to that of a secondary peak appearing at 32 to 35° (primary peak/secondary peak) in a powder X-ray diffraction chart of 3.20 or more are dispersed in a medium. It also relates to a method for polishing a substrate with the abrasive.</p>
申请公布号 EP2394960(A2) 申请公布日期 2011.12.14
申请号 EP20110166516 申请日期 2000.05.26
申请人 HITACHI CHEMICAL CO., LTD. 发明人 MATSUZAWA, JUN;SUGIMOTO, ATSUSHI;YOSHIDA, MASATO;HIRAI, KEIZOU;ASHIZAWA, TORANOSUKE;OOTSUKI, YUUTO
分类号 C01F17/00;B24B37/00;C09G1/02;C09K3/14;H01L21/304 主分类号 C01F17/00
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