| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a powder by a solid phase reaction using more effective microwave heating, by which a ceramic powder or the like having desired physical properties or excellent performances in comparison with a conventional method is obtained. <P>SOLUTION: There is provided the method for producing a powder by a solid phase reaction by irradiating a powder layer in which a raw material powder is filled, with microwave. In the method, microwave heating is performed while fluidizing the powder layer and supplying a fluidizing gas so that the filling ratio of the powder layer during fluidizing becomes a predetermined filling ratio. The filling ratio of the powder layer is reduced and the powder layer is mixed by supplying the fluidizing gas to fluidize the powder layer, and consequently, the absorption efficiency of the microwave is enhanced, and the temperature of the powder layer is raised. Thereby, the reaction is accelerated and a powder having desired physical properties or performances is obtained in a short period of time. Such a production method is suitably applied for the production of metal oxides or compound oxides, such as indium tin oxide. <P>COPYRIGHT: (C)2012,JPO&INPIT |
