| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce cost by simplifying a structure of the whole device. <P>SOLUTION: The chuck device 1 has forceps 20 capable of grasping a workpiece W at the front end thereof, an arm 30 contacting with the base end side of the forceps 20. a direct move type stepping motor 40 displacing the position of the arm 30 to the forceps 20 for making the forceps 20 openable by an elastic deformation, and a controller 50 having functions for decelerating the closing speed of the forceps 20 directly before grasping the workpiece, adjusting the closing distance of the closing state of the forceps 20, or accelerating the opening speed of the forceps when opening the workpiece. <P>COPYRIGHT: (C)2012,JPO&INPIT |
