| 摘要 |
A method for calibrating a position measuring device of an optical device, including a measurement step in which a movable unit of the optical device is moved according to a predefinable scheme in at least one degree of freedom and a position of the movable unit is determined in the at least one degree of freedom. The position of the movable unit is determined in the at least one degree of freedom in a first measurement via a first measuring device of the position measuring device, and the position of the movable unit is determined in the at least one degree of freedom in a second measurement via a second measuring device of the position measuring device sing a reference element connected to the movable unit. In a calibration step, the first measuring device is calibrated using the results of the first measurement and the second measurement. An encoder system is used as the second measuring device. The reference element includes a reference grid of the encoder system. |
