发明名称 Through hole interconnection structure for semiconductor wafer
摘要 A through-hole interconnection structure for a semiconductor wafer, in which: the each wafer includes at least a first wafer and a second wafer electrically connected to the first wafer; an electrical signal connecting section of the second wafer is provided to protrude from a bonding surface of the second wafer, the bonding surface being bonded with the first wafer; and the electrical signal connecting section has a cross section with a curved line or two or more straight lines extending in different directions when the second wafer is seen along a cross section parallel to the bonding surface.
申请公布号 US8058708(B2) 申请公布日期 2011.11.15
申请号 US20080194670 申请日期 2008.08.20
申请人 MAEBASHI TAKANORI;HONDA MOTOR CO., LTD. 发明人 MAEBASHI TAKANORI
分类号 H01L23/538 主分类号 H01L23/538
代理机构 代理人
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