| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure a distribution state of high concentration elements and low concentration elements other than main component elements contained in a steel material. <P>SOLUTION: An electron beam source 2 irradiates an electron beam E to a steel material S. WDX3 measures a distribution state of low concentration elements other than main component elements contained in the steel material S by detecting X ray generated from irradiation of the electron beam E. EDX4 measures a distribution state of high concentration elements other than the main component elements by detecting X ray transmitted through a filter 7 made of a Cr foil, thereby enabling to measure the distribution state of the high concentration elements and the low concentration elements other than the main component elements contained in the steel material S simultaneously and with high accuracy. <P>COPYRIGHT: (C)2012,JPO&INPIT |
