| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify a configuration of a part of a measuring apparatus disposed on the image plane side of an optical system and measure optical characteristics of the optical system. <P>SOLUTION: A characteristics measuring apparatus 20 comprises: a L&S pattern 21A and an L&S pattern 23A disposed on the object plane and image plane sides of a projection optical system PL; an illumination optical system ILS to illuminate the L&S pattern 21A and through the projection optical system PL the L&S pattern 23A; and a light reception system 30 to receive reflected light from the L&S pattern 23A through the projection optical system PL and the L&S pattern 21A, and imaging characteristics of the projection optical system PL are determined based on detection signals obtained from the light reception system 30 when images of the L&S pattern 21A and the L&S pattern 23A are moved relatively. <P>COPYRIGHT: (C)2012,JPO&INPIT |
