| 摘要 |
PURPOSE: A substrate inspection apparatus and method are provided to improve the accuracy of automatic substrate inspection by employing a general scattering board, not a liquid crystal scattering board. CONSTITUTION: A substrate inspection apparatus comprises a first light source(11), a second light source(21), a scattering board(30), a first camera(13), and a second camera(23). The first and second light sources irradiate first and second lights on a substrate, respectively. The scattering board is provided on the optical path of the second light in order to scatter the second light. The first camera receives the first light reflected off the substrate. The second camera receives the second light that is reflected off the substrate after passing through the scattering board.
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