A LEAKAGE CURRENT MONITORING APPARATUS FOR AN ELECTROSTATIC CHUCK SYSTEM,申请号KR20100037808-传众专利搜索

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发明名称	A LEAKAGE CURRENT MONITORING APPARATUS FOR AN ELECTROSTATIC CHUCK SYSTEM
摘要
申请公布号	KR20110118295(A)	申请公布日期	2011.10.31
申请号	KR20100037808	申请日期	2010.04.23
申请人	CHUNGJIN TECH CO., LTD.	发明人	KIM, SOON CHUL
分类号	H01L21/66;G01R31/02;H01L21/683;H01L21/687	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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