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发明名称
PHOTOSENSITIVE COMPOSITION REMOVING LIQUID
摘要
申请公布号
EP1847878(A4)
申请公布日期
2011.10.26
申请号
EP20060713814
申请日期
2006.02.09
申请人
SHOWA DENKO K.K.
发明人
KANEDA, MASATO;MIKAWA, YASUHIRO;TERAO, KOUICHI
分类号
G03F7/16;C09D9/00;G02B5/20;G03F7/26;G03F7/42;H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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