发明名称 |
Multi-degree-of-freedom actuator and stage device |
摘要 |
A multi-degree-of-freedom actuator includes a movable element having a plurality of permanent magnets, and a stator including a stator core and a plurality of coils. The permanent magnets are arranged in the X direction such that the number P of poles is an even number of two or more. The coils are of two types: X-direction driving coil and Z-direction driving coil. The Z-direction driving coils the number of which is P are disposed at positions opposite to magnetic poles of the permanent magnets. The X-direction driving coil or coils the number of which is P/2 are each disposed at a position opposite to an intermediate point between two adjacent ones of the magnetic poles of the permanent magnets.
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申请公布号 |
US8044541(B2) |
申请公布日期 |
2011.10.25 |
申请号 |
US20100879019 |
申请日期 |
2010.09.10 |
申请人 |
KABUSHIKI KAISHA YASKAWA DENKI |
发明人 |
TOYOTA AKIHITO;SHIKAYAMA TORU;KAKIHARA MASANOBU;KONO TOSHIYUKI;NAGAO MITSUNORI |
分类号 |
H02K41/02 |
主分类号 |
H02K41/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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