| 摘要 |
PROBLEM TO BE SOLVED: To reduce blur in a time-of-flight secondary ion mass analysis spectrometer, by obtaining spread of a primary beam irradiated into a sample numerically or experimentally, and by using this spread as a blurring function and restoring an image.SOLUTION: In an image treatment method of the mass analysis spectroscopic image in which ion beam or laser beam (primary beam) that is converged and short-pulsed is irradiated into the sample surface while changing position, and signal pulse intensity is two dimensionally displayed according to respective mass/electric charge ratio from the mass spectrum obtained by the time-of-flight secondary ion mass analyzer, shape of the primary beam reaching the sample surface is acquired theoretically or experimentally, then this is expressed as the blurring function, and the image is restored by using the blurring function. |
