| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder having large convenience by reducing a time until data acquisition becomes possible in the use of an electron microscope.SOLUTION: In the sample holder, a main shaft of a sample holder body is formed of a material having a low coefficient of thermal expansion. In a preferable embodiment of the sample holder, the material having the low coefficient of thermal expansion contains elements in groups IV to VI of transition metals. |
