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发明名称
VACUUM COATING SYSTEM AND METHOD FOR OPERATING A VACUUM COATING SYSTEM
摘要
申请公布号
EP2376670(A1)
申请公布日期
2011.10.19
申请号
EP20090805907
申请日期
2009.12.09
申请人
SOVELLO AG
发明人
WILLERS, GUIDO
分类号
C23C14/56;H01L21/00
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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