METHOD FOR THE PRODUCTION OF CONICAL NANOSTRUCTURES ON SUBSTRATE SURFACES

摘要

The invention relates to a method for producing conical nanostructures on substrate surfaces, in particular in optical devices, solar cells, and sensors. The method according to the invention comprises at least the steps of: a) providing a substrate surface covered with nanoparticles; b) etching the substrate surface covered with nanoparticles, wherein the nanoparticles act as an etching mask and the etching parameters are set in such a way that hyperboloid structures are produced underneath the nanoparticles; c) breaking the hyperboloid structures in the region of the smallest diameter by exerting mechanical forces, wherein the structures remaining on the substrate surface have a conical shape.