发明名称 SEMICONDUCTOR WAFER
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor wafer, capable of reducing the number of test pads, and capable of testing each transistor individually in a wafer state.SOLUTION: A plurality of semiconductor devices 2 are arranged in matrix in a semiconductor wafer 1. Dicing lines 3 are provided in order to separate the plurality of semiconductor devices 2. Each semiconductor device 2 includes a plurality of transistors 4. A plurality of test pads 5 (first test pads) are connected individually to the collectors (first terminals) of the plurality of transistors 4. A ground electrode 11 is connected commonly to the emitters (second terminals) of the plurality of transistors 4. A test pad 7 (second test pad) is connected commonly to the bases (control terminals) of the plurality of transistors 4 via wiring 6 which passes through the dicing line 3.
申请公布号 JP2011204708(A) 申请公布日期 2011.10.13
申请号 JP20100067550 申请日期 2010.03.24
申请人 MITSUBISHI ELECTRIC CORP 发明人 MUKAI KENJI;OTSUKA HIROYUKI
分类号 H01L21/66;H01L21/822;H01L27/04 主分类号 H01L21/66
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