| 摘要 |
<p>An aspect of the present invention provides a multi-beam exposure scanning method for exposing and scanning same scanning lines a plurality of times by simultaneously irradiating an object with a plurality of light beams to engrave a surface of the object. The method includes a first exposure scanning process of forming a first shape (110), which defines an outline shape of a target planar shape (121) to be left on an exposure surface of the object and an inclined section (122) around the target planar shape (121), with a first beam group, and a second exposure scanning process of forming a second shape (120), which defines a final shape of the target planar shape (121) and the inclined section (122) around the target planar shape (121), by exposing and scanning with a second beam group the same scanning lines as the scanning lines exposed and scanned in the first exposure scanning process.</p> |
