发明名称 |
CLOSED-LOOP SILICON PRODUCTION |
摘要 |
<p>A closed loop bromosilane process is provided to provide semiconductor grade silicon through the thermal decomposition of tribromosilane. The resulting silicon tetrabromide byproduct from this thermal decomposition is recycled in a silicon tetrabromide converter to produce converted tribromosilane.</p> |
申请公布号 |
WO2011123563(A1) |
申请公布日期 |
2011.10.06 |
申请号 |
WO2011US30586 |
申请日期 |
2011.03.30 |
申请人 |
PEAK SUN SILICON CORPORATION;SCHUMACHER, JOHN C. |
发明人 |
SCHUMACHER, JOHN C. |
分类号 |
C01B33/00;C01B33/02;C01B33/107 |
主分类号 |
C01B33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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