SEMICONDUCTOR ANNEALING DEVICE, METHOD OF ANNEALING SEMICONDUCTOR, AND STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a novel semiconductor annealing device, a method of annealing a semiconductor, and a storage medium to be used when annealing the semiconductor.SOLUTION: The semiconductor annealing device includes: a first laser light source for emitting a first laser pulse; a second laser light source for emitting a second laser pulse; a composite optical system for superposing the first laser pulse and the second pulse laser pulse on the same optical axis; a processing stage for holding a processing object; a waveguide optical system for transmitting the first and second laser pulses superposed on the same optical axis in the composite optical system to the processing stage; a controller for controlling emission of the first laser pulse by the first laser light source and that of the second laser pulse by the second laser light source; and a memory for storing the data including a relationship between the depth in which silicon is melted and the delay time when two laser pulses are incident onto the silicon with a delay time interval.