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发明名称
MICRO MOVING ELEMENT COMPRISING TORSION BAR
摘要
申请公布号
EP1569023(B1)
申请公布日期
2011.10.05
申请号
EP20020807976
申请日期
2002.10.10
申请人
FUJITSU LIMITED
发明人
TSUBOI, OSAMU;MIZUNO, YOSHIHIRO;UEDA, SATOSHI;SAWAKI, IPPEI;YAMAGISHI, FUMIO;SONEDA, HIROMITSU;KOUMA, NORINAO
分类号
G02B26/08;H02N1/00
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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